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AKTU Micro & Smart Systems (BIC073) Syllabus PDF – B.Tech 4th Year
Micro & Smart Systems BIC073
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Official AKTU syllabus of Micro & Smart Systems (BIC073) for B.Tech 4th Year – 3 credits, L-T-P 3-0-0. Read the unit-wise course content, course outcomes, evaluation pattern and recommended books online, or download the PDF.
Syllabus — Micro & Smart Systems
Download PDFBIC073 · 3 credits · L-T-P 3-0-0
| Unit | Topics | Lectures |
|---|---|---|
| I | Miniaturization: Introduction, Need of miniaturization, Microsystems versus MEMS, Need of micro fabrication, smart materials, structures and systems, integrated Microsystems, applications of smart materials and Microsystems. | 8 |
| II | Micro sensors, actuators, systems and smart materials: Silicon capacitive accelerometer, piezo-resistive pressure sensor, conductometric gas sensor, an electrostatic combo -drive, a magnetic micro-relay, portable blood analyzer, piezoelectric inkjet print head, micro-mirror array for video projection, smart materials and systems. | 8 |
| III | Micromachining technologies: Silicon as a material for micro machining, thin film deposition, lithography, etching, silicon micromachining, specialized materials for Microsystems, advanced processes for micro fabrication. | 8 |
| IV | Modeling of solids in Microsystems: Bar, beam, energy methods for elastic bodies, heterogeneous layered beams, bimorph effect, residual stress and stress gradients, poisson effect and the anticlastic curvature of beams, torsion of beams and shear stresses, dealing with large displacements, In-plane stresses. Modeling of coupled electromechanical systems: Electrostatics, Coupled Electro-mechanics: statics, stability and pull-in phenomenon, dynamics, Squeezed film effects in electro-mechanics. | 8 |
| V | Integration of micro and smart systems: Integration of Microsystems and microelectronics, microsystems packaging, case studies of integrated Microsystems, case study of a smart-structure in vibration control. Scaling effects in Microsystems: scaling in: mechanical domain, electrostatic domain, magnetic domain, diffusion, effects in the optical domain, biochemical phenomena. | 8 |
Text Books
- G. K. Ananthasuresh, K. J. Vinoy, S. Gopalakrishnan, K. N. Bhat and V. K. Aatre, “Micro and smart systems”, Wiley India, 2010.
- S Nihtianov, A. Luque “Smart Sensors and MEMS”, Woodhead publishing limited 2014. E - Resources: https://nptel.ac.in/courses/112/108/112108092/
Course Outcomes
- Interpret the need of Microsystems and Miniaturization.
- Design the smart materials, actuators and Micro sensors.
- Interpret the Micromachining Technologies.
- Analyze the modeling of solids in Microsystems.
- Evaluate the case studies of mart systems.
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