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AKTU Introduction to MEMS (BOE063) Syllabus PDF – B.Tech Open Elective (3rd Year)
Introduction to MEMS BOE063
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Official AKTU syllabus of Introduction to MEMS (BOE063) for B.Tech Open Elective (3rd Year) – 3 credits, L-T-P 3-0-0. Read the unit-wise course content, course outcomes, evaluation pattern and recommended books online, or download the PDF.
Syllabus — Introduction to MEMS
Download PDFBOE063 · 3 credits · L-T-P 3-0-0
COURSE OBJECTIVE: After completion of the course student will be able to:
- Understand the Basic concept of MEMS, Mechanics of Beam and Diaphragm Structures, Air Damping and Electrostatic Actuation.
- Know the knowledge of Thermal Effects and the Applications of MEMS in RF. COURSE OUTCOME: After completion of the course student will be able to: CO1: Understand the Basic concept of MEMS Fabrication Technologies, Piezoresistance Effect, Piezoelectricity, Piezoresistive Sensor. CO2: Explain Mechanics of Beam and Diaphragm Structures. CO3: Understand the Basic concept of Air Damping and Basic Equations for Slide-film Air Damping, Couette-flow Model, Stokes-flow Model. CO4: Know the concept of Electrostatic Actuation. CO5: Understand the applications of MEMS in RF
| BOE-063 INTRODUCTION TO MEMS | ||
| Unit | Topic | Lectures |
| 1 | Introduction to MEMS: MEMS Fabrication Technologies, Materials and Substrates for MEMS, Processes for Micromachining, Characteristics, Sensors/Transducers, Piezoresistance Effect, Piezoelectricity, Piezoresistive Sensor. | 8 |
| 2 | Mechanics of Beam and Diaphragm Structures: Stress and Strain, Hooke's Law. Stress and Strain of Beam Structures: Stress, Strain in a Bent Beam, Bending Moment and the Moment of Inertia, Displacement of Beam Structures Under Weight, Bending of Cantilever Beam Under Weight. | 8 |
| 3 | Air Damping: Drag Effect of a Fluid: Viscosity of a Fluid, Viscous Flow of a Fluid, Drag Force Damping, The Effects of Air Damping on Micro-Dynamics. Squeeze-film Air Damping: Reynolds' Equations for Squeeze-film Air Damping, Damping of Perforated Thick Plates. Slide-film Air Damping: Basic Equations for Slide-film Air Damping, Couette-flow Model, Stokes-flow Model. | 8 |
| 4 | Electrostatic Actuation: Electrostatic Forces, Normal Force, Tangential Force, Fringe Effects, Electrostatic Driving of Mechanical Actuators: Parallel-plate Actuator, Capacitive sensors. Step and Alternative Voltage Driving: Step Voltage Driving, Negative Spring Effect and Vibration Frequency. | 8 |
| 5 | Thermal Effects: Temperature coefficient of resistance, Thermo-electricity, Thermocouples, Thermal and temperature sensors. Applications of MEMS in RF MEMS Resonator Design Considerations, One-Port Micromechanical Resonator Modeling Vertical Displacement Two-Port Microresonator Modeling, Micromechanical Resonator Limitations. | 8 |
Text & Reference Books:
- G. K. Ananthasuresh, K. J. Vinoy, S. Gopalakrishnan, K. N. Bhat and V. K. Atre, “Micro and smart systems”, Wiley India, 2010.
- S.M. Sze, “Semiconductor Sensors”, John Wiley & Sons Inc., Wiley Interscience Pub.
- M.J. Usher, “Sensors and Transducers”, McMillian Hampshire.
- RS Muller, Howe, Senturia and Smith, “Micro sensors”, IEEE Press. Open Elective I AICTE Model Curriculum B series (VI Semester) Syllabus 2024-25
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